APPLICATION

Application for Semiconductor

Process gases monitoring for semiconducting manufactures

Application case

Process gases monitoring for semiconducting manufactures

In semiconductor manufacturing, it is important on the quality and productivity ensure that manages variou process such as CVD, etching and epitaxial growth. infiTOF can be used to monitor reaction products in process gases with high-resolution.


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Download the infiTOF brochure for Process gases monitoring of semiconducting

On-line monitoring of Trimethyl gallium (TMG) reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE)

Download the Application notes for Semiconductor

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