APPLICATION FOR SEMICONDUCTOR

Application for Semiconductor

Application case

Process gases monitoring for semiconducting manufactures

In semiconductor manufacturing, it is important on the quality and productivity ensure that manages variou process such as CVD, etching and epitaxial growth. infiTOF can be used to monitor reaction products in process gases with high-resolution.

Application case

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Download the infiTOF brochure for Process gases monitoring of semiconducting

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On-line monitoring of Trimethyl gallium (TMG) reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE)

Download the Application notes for Semiconductor

In situ monitoring of Ga(CH3)3 reaction with HCl on nitride semiconductor Metal-Organic Vapor Phase Epitaxy (MOVPE) by using “infiTOF”
Semiconductor manufacturing process gas analysis. (coming soon)
TMG and NH 3 decomposition analysis on MOVPE. (coming soon)
Reaction gas analysis on Nitride semiconductor by using infiTOF
Online measurement of HCl and TMG reaction on MOVPE. (coming soon)

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